Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Use

Air, Gas, and Vent Filtration

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches

Product ID: CLR1030
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
10 micron
Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 9.75 inches

Product ID: CLR1975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
1 micron
Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 29.25 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 29.25 inches

Product ID: CLR102925
Unit of Measure
12/EA
Min Order Qty
12
Length
74.3 cm / 29.25 in
Micron
10 micron

Ultipor® N66 Filter Cartridges, ABN3NB7BH4

Product ID: ABN3NB7BH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Nylon with integral polyester non-woven filtrate
Filter Cartridge Style
Code 7
Maximum Differential Pressure
5.4 bard @ < 50° C (122◦ F)
Cage, Core
Polypropylene
End Cap and Fin End
Unpigmented Nylon 6-10
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Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches

Product ID: CLR1020
Unit of Measure
24/EA
Min Order Qty
24
Length
50.8 cm / 20 in
Micron
10 micron

Fuente II Filter Cartridge, AB3FFN7WH4

Product ID: AB3FFN7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Effective Filtration Area (Metric m²)
3.12 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Emflon® HTPFRW Filter Cartridges, AB3HTPFR7WH4

Product ID: AB3HTPFR7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
25200 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
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AB1UVI3EHF

Product ID: AB1UVI3EHF
Unit of Measure
1/EA
Min Order Qty
1

Claris® Filter Cartridge, CLR120W480

Product ID: CLR120W480
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket O-Ring Code
Blank
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: ARD1010UEM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Oenopure™ Filter Cartridges, AB1GB7WH4

Product ID: AB1GB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Hydrophillic Polyethersulfone
Effective Filtration Area (Metric cm²)
0.6 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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This product is currently not available. Please contact us for more information.

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 19.5 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 19.5 inches

Product ID: CLR10195
Unit of Measure
24/EA
Min Order Qty
24
Length
49.5 cm / 19.5 in
Micron
10 micron
43 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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