Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

Gasket / O-Ring Material

EPDM

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT120UM3E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, EPDM, SOE fin end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, EPDM, SOE fin end external 222 O-rings

Product ID: NXT130UM8E
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT130UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, EPDM, SOE fin end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, EPDM, SOE fin end external 222 O-rings

Product ID: NXT140UM8E
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 30 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 30 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT5030UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
50 micron
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT540UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 222 O-rings

Product ID: PFT02530UEM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches, EPDM, DOE industrial

Product ID: PFT02530UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
PFT 0.45-20UE-M7W 480 product photo

PFT 0.45-20UE-M7W 480

Product ID: PFT04520UEM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm

Discontinued

This part is no longer available. Please contact us for more information.
PFT 0.45-30UEW 480 product photo

PFT 0.45-30UEW 480

Product ID: PFT04530UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, EPDM, DOE industrial

Product ID: PFT0830UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
PFT 5-30UEW 480 product photo

PFT 5-30UEW 480

Product ID: PFT530UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
43 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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