Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Media

Polypropylene

Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer

Product ID: ARD130UVM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 39 Inches

Product ID: ARD139UNDOE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
39 in
Cartridge Length (Metric)
991 mm
Cartridge Length (Metric)
99.1 cm
Gasket / O-Ring Material
Nitrile
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 Inches, silicone, SOE fin end external 226 O-rings

Product ID: ARD140USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 20 Inches, DOE Santoprene gasket seal

Product ID: ARD2020UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
H21
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches

Product ID: ARD320UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
H21
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 10 Inches

Product ID: ARD4010UEDOE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® ARD, Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 19.75 Inches

Product ID: ARD401975UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.75 in
Cartridge Length (Metric)
502 mm
Cartridge Length (Metric)
50.2 cm
End Configuration Code
H21
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: ARD510UEDOE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® ARD, Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 30 Inches

Product ID: ARD4030UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration Code
H21
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, silicone

Product ID: ARD510USM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 Inches

Product ID: ARD530UNDOE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
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Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches

Product ID: NXA0510U
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
1,089 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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