Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industrial Manufacturing

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Product Type

Filter Cartridges

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer

Product ID: AB3Y40018H
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
753 mm
Cartridge Length (Metric)
75.3 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Filter 40" Profile II 0,5µm product photo

Filter 40" Profile II 0,5µm

Product ID: AB4Y0057J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CRTG AB4Y0308J

Product ID: AB4Y0308J
Unit of Measure
12/EA
Min Order Qty
12

Filter 40" Profile II 5µm

Product ID: AB4Y05018J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

AB4Y03018J

Product ID: AB4Y03018J
Unit of Measure
12/EA
Min Order Qty
12

AB4Y10018H

Product ID: AB4Y10018H
Unit of Measure
12/EA
Min Order Qty
24

AB4Y10018J

Product ID: AB4Y10018J
Unit of Measure
12/EA
Min Order Qty
12

AB4Y30018J

Product ID: AB4Y30018J
Unit of Measure
12/EA
Min Order Qty
12

CTRG PROFILE R4F 100 ECO TEC 12684

Product ID: 12684
Unit of Measure
9/EA
Min Order Qty
9

Filter 10" Profile II 1µm

Product ID: AB1Y0107H
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.

AB1Y0508H4

Product ID: AB1Y0508H4
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.

Profile® II Filter Cartridges, Polypropylene, Length 20 inches, silicone, AS568A - 222 O ring Size

Product ID: AB2Y0078H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
506 mm
Cartridge Length (Metric)
50.6 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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This product is currently not available. Please contact us for more information.

38 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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