Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Poly-Fine® II, Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 Inches, silicone

Product ID: PFT2010USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 5 inches

Product ID: NXT1505U
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
150 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
NA
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 5 μm, GlassFiber, Length 10 inches

Product ID: HA522602
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 2000
Element Series
HA522
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 20 Inches, Electrolytic tin plated steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 20 Inches, Electrolytic tin plated steel, Bulk packaging

Product ID: R005AW20T
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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U001A9.75U-1PK product photo

U001A9.75U-1PK

Product ID: U001A975U1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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This product is currently not available. Please contact us for more information.

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, EPDM, SOE fin end external 222 O-rings

Product ID: CLR1030M8E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
EPDM
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 25 μm, GlassFiber, Length 8 Inches

Product ID: HC6300FRT8Z
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC6300
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
25 micron (Beta 2000)
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 19.5 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 19.5 Inches, Polypropylene

Product ID: U005AW195U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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This product is currently not available. Please contact us for more information.

Poly-Fine® ARD, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: ARD510UEM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
End Configuration
SOE flat closed end, external 222 O-rings
Change Out Differential Pressure
2.4 bard

This product is currently not available. Please contact us for more information.

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, Nitrile product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, Nitrile

Product ID: NXA0510UM3N
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron

Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: NXT4040UM3N
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 25 μm, GlassFiber, Length 16 inches

Product ID: HC9400FRT16Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9400
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
25 micron (Beta 2000)
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5,183 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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