Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

WCG150-30-U001ZJ-106-K10

Product ID: WCG15030U001S00001
Unit of Measure
1/EA
Min Order Qty
1

Claris® Filter Cartridge, 3 µm, 10 in, Double Open Ended with No Endcaps

Product ID: CLR310W480
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Change Out Differential Pressure
2.4 bard
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5ESC10670-1U0045J-017

Product ID: 5ESC106701U0S00001
Unit of Measure
1/EA
Min Order Qty
1

Poly-Fine® XLD Filter Cartridges, Removal Rating 1.5 μm, Polypropylene, Length 20 inches, Nitrile, DOE industrial

Product ID: XLD1520UN
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Nitrile
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R2F700

Product ID: R2F700TIMONIUM
Unit of Measure
24/EA
Min Order Qty
48

Duo-Fine® , Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, silicone, DOE internal O-rings

Product ID: DFNT110USM10
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
1 µm
End Configuration
DOE, internal O-rings (fits other manufacturers’
Change Out Differential Pressure
2.4 bard

FILTER

Product ID: ABGN2FN0507H13
Unit of Measure
1/EA
Min Order Qty
1

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches, Timonium

Product ID: R3F400TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration
R type housing
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5ESC10670-2U0045J-076

Product ID: 5ESC106702U0S00005
Unit of Measure
1/EA
Min Order Qty
1

MCS1001ECH13

Product ID: MCS1001ECH13
Unit of Measure
1/EA
Min Order Qty
1

Profile® Nylon, Filter Cartridges, Removal Rating 40 μm, Nylon, Length 10 Inches

Product ID: RGN1FN400NPL
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Profile® Nylon, Filter Cartridges, Removal Rating 7 μm, Nylon, Length 20 Inches

Product ID: RGN2F070AOC
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
7 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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2,498 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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