Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 10 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 10 Inches, 304 stainless steel, Bulk packaging

Product ID: C005A10A
Unit of Measure
1/EA
Min Order Qty
30
Packaging
Bulk
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Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: R3F050
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration
R type housing
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50P10U-1PK 359

Product ID: 50P10U1PK359
Unit of Measure
30/EA
Min Order Qty
30

MCY4463ECJ

Product ID: MCY4463ECJ
Unit of Measure
6/EA
Min Order Qty
6

Profile® II Filter Cartridge

Product ID: ME3310FPS30H
Unit of Measure
1/EA
Min Order Qty
1

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 20 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT7520UM3E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
75 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
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Duo-Fine®, Filter Cartridges, Removal Rating 3 μm, Length 20 Inches

Product ID: DFPT320ETM8563
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
M8
End Configuration
SOE fin end, external 222 O-rings (retrofits other manufacturers’ Code 5) 3
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Duo-Fine® , Filter Cartridges, Removal Rating 3 μm, Length 30 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN330UN
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, Nitrile, SOE fin end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, Nitrile, SOE fin end external 222 O-rings

Product ID: NXA520UM8N
Unit of Measure
24/EA
Min Order Qty
24
Micron
5 micron

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: R2F400
Unit of Measure
6/EA
Min Order Qty
6
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration
R type housing
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This product is currently not available. Please contact us for more information.

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, GlassFiber, Length 10 Inches, 316 stainless steel, with Core Cover, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, GlassFiber, Length 10 Inches, 316 stainless steel, with Core Cover, Individually wrapped

Product ID: F005A10SCE1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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Nexis® T Series Filter Cartridges, Polypropylene, 30 µm, 30 in., Silicone Elastomer, M7

Product ID: NXT3030UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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3,590 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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