Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches, silicone, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches, silicone, SOE fin end external 222 O-rings

Product ID: PFT320USM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
PERMI-L 57-U-A-R 624 product photo

PERMI-L 57-U-A-R 624

Product ID: PERMIL57UAR624
Unit of Measure
272/EA
Min Order Qty
272
Packaging
Bulk
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Ultipor III Glass Fiber 7 micron (Beta 1000) Fluorocarbon 16in 40.64cm

Product ID: HC8900FTN16Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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Profile® Nylon, Filter Cartridges, Removal Rating 5 μm, Nylon, Length 30 Inches

Product ID: RGN3FN050
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
5 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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RLS1FPS200

Product ID: RLS1FPS200
Unit of Measure
1/EA
Min Order Qty
1

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 4 inches

Product ID: HC9100FRZ4Z
Unit of Measure
10/EA
Min Order Qty
10
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9100
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
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Duo-Fine® , Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN140UN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXA140UM7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 9.75 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 9.75 Inches, Polypropylene

Product ID: U010A975U
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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Discontinued

This part is no longer available. Please contact us for more information.

200NC30U

Product ID: 200NC30U
Unit of Measure
20/EA
Min Order Qty
20

MPNT 50-10N

Product ID: MPNT5010N
Unit of Measure
30/EA
Min Order Qty
30

HC3310FPS40H

Product ID: HC3310FPS40H
Unit of Measure
1/EA
Min Order Qty
1
5,183 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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