Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Ultipor®

Product Type

Filter Cartridges

5ESC10770-3U001ZJ-097 product photo

5ESC10770-3U001ZJ-097

Product ID: 5ESC107703U0S00008
Unit of Measure
1/EA
Min Order Qty
1
5ESC10770-3U100ZJ-004 product photo

5ESC10770-3U100ZJ-004

Product ID: 5ESC107703U1S00002
Unit of Measure
1/EA
Min Order Qty
1
5ESC10770-3U220ZJ-142 product photo

5ESC10770-3U220ZJ-142

Product ID: 5ESC107703U2S00005
Unit of Measure
1/EA
Min Order Qty
1
5ESC10770-4U6-40ZJ-105 product photo

5ESC10770-4U6-40ZJ-105

Product ID: 5ESC107704U6S00001
Unit of Measure
1/EA
Min Order Qty
1
5ESC11270-2CHJS-032 product photo

5ESC11270-2CHJS-032

Product ID: 5ESC112702CHJS032
Unit of Measure
1/EA
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1
5ESC11270-2CHJS-031 product photo

5ESC11270-2CHJS-031

Product ID: 5ESC112702CHJS031
Unit of Measure
1/EA
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1
5ESD12042-381 product photo

5ESD12042-381

Product ID: 5ESD12042381
Unit of Measure
1/EA
Min Order Qty
1

AB05U200Z7H4

Product ID: AB05U200Z7H4
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Ultipor® N66 Filter Cartridges, Polyester Hardware, 0.45 µm Single Layer, 10 in, Single Open Ended Code 3, Silicone Elastomer O-ring

Product ID: AB1NB3WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
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Ultipor® N66 Filter Cartridges, Polyester Hardware, 0.45 µm Single Layer, 10 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB1NB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
See All Attributes
CRTG AB1U200Z-7J product photo

CRTG AB1U200Z-7J

Product ID: AB1U200Z7J
Unit of Measure
1/EA
Min Order Qty
1

CRTG DFA4001U2-20Z

Product ID: DFA4001U2-20Z
Unit of Measure
6/EA
Min Order Qty
6
164 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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