Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Ultipor®

CA41077D04 product photo

CA41077D04

Product ID: CA41077D04
Unit of Measure
1/EA
Min Order Qty
1

Ultipor® N66 Filter Cartridges, ABN3NB7BH4

Product ID: ABN3NB7BH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Nylon with integral polyester non-woven filtrate
Filter Cartridge Style
Code 7
Maximum Differential Pressure
5.4 bard @ < 50° C (122◦ F)
Cage, Core
Polypropylene
End Cap and Fin End
Unpigmented Nylon 6-10
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MCS1201U6-40ZK2-NO GSKT

Product ID: MCS1201U640ZS00001
Unit of Measure
1/EA
Min Order Qty
1

WCN80-20-U010ZJ-MOD

Product ID: WCN8020U010ZJMOD
Unit of Measure
1/EA
Min Order Qty
1

MCS1001USH13

Product ID: MCS1001USH13
Unit of Measure
6/EA
Min Order Qty
6

MCS1001U010ZH

Product ID: MCS1001U010ZH
Unit of Measure
12/EA
Min Order Qty
12

Ultipor® GF Plus, Filter Cartridges, Length 30 Inches, Ethylene Propylene

Product ID: AB3U010Z7J
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Ethylene Propylene
Gasket O-Ring Code
J
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CRTG PUY3U100ZH13

Product ID: PUY3U100ZH13
Unit of Measure
12/EA
Min Order Qty
12

WCG150-30-U6-40ZJ

Product ID: WCG15030U640ZJ
Unit of Measure
1/EA
Min Order Qty
1

CRTG DFA4001U2-20Z

Product ID: DFA4001U2-20Z
Unit of Measure
6/EA
Min Order Qty
6
5EC4888-640 product photo

5EC4888-640

Product ID: 5EC4888640
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CRTG MCY1001U2-20ZH

Product ID: MCY1001U220ZH
Unit of Measure
24/EA
Min Order Qty
24
96 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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