Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Product Sub Type

Pleated Filters

Product Type

Filter Cartridges

Fuente II Filter Cartridge, AB1FFN7WH4

Product ID: AB1FFN7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PES, with built in pre-filtration
Effective Filtration Area (Metric m²)
1.04 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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Fluorodyne® II Filter Cartridges, AB1FSD7WH4

Product ID: AB1FSD7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Hydrophilic polyvinylidene fluoride (PVDF)
Effective Filtration Area (Metric m²)
0.55 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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Emflon® HTPFRW Filter Cartridges, AB1HTPFR7WH4

Product ID: AB1HTPFR7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
8400 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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Ultipor® N66 Filter Cartridges, Polyester Hardware, 0.45 µm Single Layer, 10 in, Single Open Ended Code 3, Silicone Elastomer O-ring

Product ID: AB1NB3WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
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Ultipor® N66 Filter Cartridges, Polyester Hardware, 0.45 µm Single Layer, 10 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB1NB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
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FEATURED

Emflon® PFRW Filter Cartridge, AB1PFR3WH4

Product ID: AB1PFR3WH4
Unit of Measure
1/EA
Min Order Qty
1

Emflon® PFRW Filter Cartridge, AB1PFR8WH4

Product ID: AB1PFR8WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
8000 cm²
Filter Cartridge Style
Code 8
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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Emflon® PFRW Junior Style Filter Cartridges, MCY1110PFRWH4

Product ID: MCY1110PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
500 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
1.3 in
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Fluorodyne® II Junior Filter Cartridges, MCY4440FSDWH4

Product ID: MCY4440FSDWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
0.152 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
4.17 in
Cartridge Length (Metric)
106 mm
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FEATURED

Emflon® PFRW Junior Style Filter Cartridge, MCY2230PFRWH4

Product ID: MCY2230PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
1400 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
3 in
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MCY4463NFWH4

Product ID: MCY4463NFWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Industry-Specific Certification
W480 Food Contact
Filter Cartridge Style
MCY-style junior
Gasket O-Ring Code
H4
Food Contact Compliant
Yes
O-Ring Seal
Silicone Elastomer
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FEATURED

Emflon® PFRW Junior Style Filter Cartridge, MCY4463PFRWH4

Product ID: MCY4463PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
2800 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
5.3 in
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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