Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Gasket / O-Ring Material

Silicone Elastomer

PFT 30-30US-M8W 480 product photo

PFT 30-30US-M8W 480

Product ID: PFT3030USM8W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
Poly-Fine® II Filter Cartridge, PFT330USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT330USM7W480

Product ID: PFT330USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
3 µm
Poly-Fine® II Filter Cartridge, PFT510USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT510USM7W480

Product ID: PFT510USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 µm
Poly-Fine® II Filter Cartridge, PFT530USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT530USM7W480

Product ID: PFT530USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 µm
Poly-Fine® II Filter Cartridge, PFT540USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT540USM7W480

Product ID: PFT540USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 µm

Profile® UP Filter Cartridges, 10 in, 10µm, Silicone Elastomer

Product ID: AB1UY1007WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone Elastomer
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MEMBRAcart XP Filter Cartridges, AB3MBX7WH4

Product ID: AB3MBX7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Polyethersulfone (PES)
Effective Filtration Area (Metric m²)
1.8 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
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Profile® UP Filter Cartridges, 30 in, 10 µm, Silicone Elastomer

Product ID: AB3UY1007WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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Ultipor® N66 Filter Cartridges, Nylon Hardware, 0.45 µm Single Layer, 40 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: ABN4NB7BWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
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Claris® Filter Cartridge, 1 µm, 30 in, Single Open End with Fin End, 2 Locking Tabs and External 226 O-rings

Product ID: CLR130M7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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Nexis® T Series Filter Cartridges, Polypropylene, 10 µm, 30 in., Silicone Elastomer, M7

Product ID: NXT1030UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
See All Attributes
Poly-Fine® II Filter Cartridge, PFT02510USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT02510USM7W480

Product ID: PFT02510USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm
54 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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