Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Availability

In Stock

FEATURED

Emflon® PFRW Filter Cartridge, AB2PFR7WH4

Product ID: AB2PFR7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric m²)
1.6 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
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Profile® Star Filter Cartridge, AB3A0307WH4

Product ID: AB3A0307WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Profile® Star Filter Cartridge, AB3A0107WH4

Product ID: AB3A0107WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Fluorodyne® II Filter Cartridges, AB3FSD7WH4

Product ID: AB3FSD7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Hydrophilic polyvinylidene fluoride (PVDF)
Effective Filtration Area (Metric cm²)
1.65 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
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Profile® UP Filter Cartridges, 30 in, 10 µm, Silicone Elastomer

Product ID: AB3UY1007WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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INLET/OUTLET ADAPTOR KIT SUPRAPAK L

Product ID: ACS1034GM
Unit of Measure
1/EA
Min Order Qty
1

KIT ACS1050EA DN65 DIN 11851 GASKET

Product ID: ACS1050EA
Unit of Measure
1/EA
Min Order Qty
1

KIT VENT TEE, 1" CLAMP, SILICONE

Product ID: ACS0956AU
Unit of Measure
1/EA
Min Order Qty
1

Housing O-Ring Gen 2&3

Product ID: ACS1039EM
Unit of Measure
1/EA
Min Order Qty
1

Seitz® K Series Depth Filter Sheets, K 200 400x400

Product ID: B07628
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
15.8 x 15.8 in
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Seitz® K Series Depth Filter Sheets, K 100 400x400

Product ID: B07573
Unit of Measure
1/EA
Min Order Qty
1
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
15.8 x 15.8 in
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Seitz® K Series Depth Filter Sheets, SEITZ-EK 400x400

Product ID: B07570
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
1.5 bar
Size (Imperial)
15.8 x 15.8 in
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102 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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