Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Power & Utilities

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 40 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 40 Inches, 304 stainless steel, Bulk packaging

Product ID: C050AW40A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 20 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 20 Inches, 316 stainless steel, Bulk packaging

Product ID: C050AW20S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 10 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 10 Inches, 316 stainless steel

Product ID: C05A10S
Unit of Measure
30/EA
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30
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Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 30 Inches, 316 stainless steel, with Core Cover product photo

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 30 Inches, 316 stainless steel, with Core Cover

Product ID: C05AW30SC
Unit of Measure
10/EA
Min Order Qty
10
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Bulk
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HZ4740CMV

Product ID: HZ4740CMV
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.
HOUSING IDLD1GN12H product photo

HOUSING IDLD1GN12H

Product ID: IDLD1GN12H
Unit of Measure
1/EA
Min Order Qty
1
LMO10S-3/4HP product photo

LMO10S-3/4HP

Product ID: LMO10S34HP
Unit of Measure
1/EA
Min Order Qty
1

HDC® II Filter Cartridges, Removal Rating 4.5 μm, Length 20 inches, 222 Finned end

Product ID: AB2J0458PH1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
4.5 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
Cartridge Outer Diameter (OD) (Metric)
7 cm
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AB2PYN18JDUP

Product ID: AB2PYN18JDUP
Unit of Measure
24/EA
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24
AIRGUARD FILTER 16X20X2 product photo

AIRGUARD FILTER 16X20X2

Product ID: AGMX40STD2201
Unit of Measure
12/EA
Min Order Qty
12
SUPRAdisc SD 300 300X300C216PP product photo

SUPRAdisc SD 300 300X300C216PP

Product ID: B15123
Unit of Measure
1/EA
Min Order Qty
1
DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Polyester, Length 30 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Polyester, Length 30 Inches

Product ID: E005AW30A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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127 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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