Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

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Product Type

Large Format Filters

Marksman™, Large Format Filters, Filter Grade 70 µm, Borosilicate micro fiberglass with acrylic binder, Size 2 bag, EPDM

Product ID: DFNM702UEPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
70 µm
Hardware Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm

Marksman™, Large Format Filters, Filter Grade 70 µm, Borosilicate micro fiberglass with acrylic binder, Size 2 bag, Nitrile

Product ID: DFNM702UNPFB
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
70 µm
Hardware Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm

Profile® Coreless Large Format Filters, Removal Rating 40 μm, Polypropylene, Length 20 inches, 316L Stainless Steel Core Assembly

Product ID: E602Y400
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
20/508 inch/mm
Filter Grade
40 µm
Media Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm

Profile® Coreless Large Format Filters, Removal Rating 40 μm, Polypropylene, Length 40 inches, 316L Stainless Steel Core Assembly

Product ID: E604Y400
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
40 µm
Media Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Resinbondedglassfiber, Length 60 Inches, Nitrile O-ring Material

Product ID: HFU660GF100H13
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
Cartridge Length (Metric)
526 mm
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Marksman™, Large Format Filters, Filter Grade 10 µm, polypropylene, Size 1 bag, Fluorocarbon elastomer, Plastic self-adjusting flange

Product ID: PFTM101UVPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™, Large Format Filters, Filter Grade 10 µm, polypropylene, Size 2 bag, Nitrile, Plastic self-adjusting flange, FSI FSPN Series vessels Hayward7 over the top

Product ID: PFTM102UNPFC
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™ High Flow, Large Format Filters, Filter Grade 10 µm, polypropylene, Length 40 Inches, Nitrile O-ring

Product ID: PFTM1040UHFH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Marksman™, Large Format Filters, Filter Grade 10 µm, polypropylene, Length 40 Inches

Product ID: PFTM104UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™, Large Format Filters, Filter Grade 10 µm, polypropylene, Size 2 bag, EPDM, Plastic self-adjusting flange, Pall Marksman Series vessels Rosedale4 Strainrite Krystil Klear5

Product ID: PFTM102UEPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™ High Flow, Large Format Filters, Filter Grade 10 µm, polypropylene, Length 40 Inches, Ethylene Propylene O-ring

Product ID: PFTM1040UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Marksman™, Large Format Filters, Filter Grade 1 µm, polypropylene, Size 1 bag, EPDM

Product ID: PFTM11UEPFA213
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 bag
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes
230 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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