Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Seal Material

Fluorocarbon

Anti Static

No

HCA082EOS8Z ELEMENT

Product ID: HCA082EOS8Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCA082
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
100 µm
Nominal Length (Imperial)
8 in
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Versalon Glass Fiber Fluorocarbon 8in 20.32cm length (REPLACED BY HCG200FRD8Z)

Product ID: HCG200FKD8Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCG200
Family
Versalon
Filter Media
Glass Fiber
Nominal Length (Imperial)
8 in
Nominal Length (Metric)
20.32 cm
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Discontinued

This part is no longer available. Please contact us for more information.

Red1000 Glass Fiber 3 micron (Beta 1000) Fluorocarbon 36in 91.44cm (REPLACED BY HC0101FRZ36Z)

Product ID: HC0101FKZ36Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0101
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 1000)
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Ultipor III Wire Mesh 65 micron Fluorocarbon 3in 7.62cm length

Product ID: HC0469EOR3Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Element Series
HC0469
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
65 µm
Nominal Length (Imperial)
3 in
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Ultipor III Fluorocarbon 40in 101.6cm length

Product ID: HC0678FGN40Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC0678
Family
Ultipor III
Filter Removal Rating (μm)
-
Nominal Length (Imperial)
40 in
Nominal Length (Metric)
101.6 cm
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This product is currently not available. Please contact us for more information.

Element Coralon HC2196FCS6Z50

Product ID: HC2196FCS6Z50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2196
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron, Beta 1000
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Ultipor Wire Mesh 25µm Fluorocarbon Seal 3in 7.62cm length

Product ID: HC2206EOJ3Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2206
Family
Ultipor
Filter Media
Wire Mesh
Filter Removal Rating (μm)
25 µm
Nominal Length (Imperial)
3 in
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Red1000 Glass Fiber 7 micron (Beta 1000) Fluorocarbon 3in 7.62cm (REPLACED BY HC2206FRN3Z)

Product ID: HC2206FKN3Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2206
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Fluorocarbon 3in 7.62cm (REPLACED BY HC2206FRP3Z)

Product ID: HC2206FKP3Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2206
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Fluorocarbon 4in 10.16cm (REPLACED BY HC2216FRP4Z)

Product ID: HC2216FKP4Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2216
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 12 micron (Beta 1000) Fluorocarbon 6in 15.24cm (REPLACED BY HC2216FRS6Z)

Product ID: HC2216FKS6Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2216
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Element Coralon HC2225FCP9Z

Product ID: HC2225FCP9Z
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2225
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 Micron, Beta 1000
See All Attributes
168 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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