Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Ultipor

Seal Material

Nitrile

Ultipor, 6000psi Non-bypass Simplex Hsg, 1.5in BSP Ports, 8in Length, Nitrile Seals

Product ID: HH9681C24SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in BSP Ports, 8in Length, Nitrile Seals

Product ID: HH9681C20SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in Manifold Mount, 8in Length, Nitrile Seals

Product ID: HH9681S20SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in Manifold Mount, 13in Length, Nitrile Seals

Product ID: HH9681K20TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in Manifold Mount, 13in Length, Nitrile Seals

Product ID: HH9681S20TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1in Manifold Mount, 8in Length, Nitrile Seals

Product ID: HH9801K16SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
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Ultipor, 6000psi Simplex Hsg, 2in Flange Ports, Nitrile Seals

Product ID: HH9904D32KSLB1Y620
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (3000 #)
Family
Ultipor
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
Material of Construction
Iron|Steel
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Ultipor, 6500psi Simplex Hsg, 1.5in SAE Ports, 16in Length, Nitrile Seals

Product ID: UK46797
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1
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Ultipor Glass Fiber 5µm Nitrile Seal 8in 20.32cm length

Product ID: F1364531
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2206
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating
5 micron, Beta 1000
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Ultipor, 250psi Simplex Hsg, 0.75in SAE Ports, Nitrile Seals

Product ID: HH7400A12B1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Family
Ultipor
Pressure Rating
250 psi
Port Size
0.75 in
Number of Cartridges
1
Material of Construction
Cast Iron
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Ultipor Glass Fiber 7µm Nitrile Seal 18in 45.72cm length

Product ID: HC0101FKN18HY533
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0101
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating
7 micron, Beta 1000
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Ultipor Glass Fiber 3µm Nitrile Seal 36in 91.44cm length

Product ID: HC0101FKZ36H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0101
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
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59 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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