Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Grade

5 µm

Marksman™ High Flow, Large Format Filters, Filter Grade 5 µm, polypropylene, Length 20 Inches

Product ID: PFTM520UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Marksman™ High Flow, Large Format Filters, Filter Grade 5 µm, polypropylene, Length 40 Inches, Fluorocarbon Elastomer O-ring

Product ID: PFTM540UHFH238
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Marksman™ Retrofit, Large Format Filters, Filter Grade 5 µm, polypropylene, Length 38 Inches, EPDM

Product ID: PFTM5740E
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
38/965 inches/mm
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
150 mm
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Marksman™ High Flow, Large Format Filters, Filter Grade 5 µm, polypropylene, Length 40 Inches, Ethylene Propylene O-ring

Product ID: PFTM540UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Marksman™ High Flow, Large Format Filters, Filter Grade 5 µm, polypropylene, Length 60 Inches

Product ID: PFTM560UHFH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Marksman™ High Flow, Large Format Filters, Filter Grade 5 µm, polypropylene, Length 60 Inches, Ethylene Propylene O-ring

Product ID: PFTM560UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Vector™ Large Format Filters, Removal Rating 5 μm, Polypropylene, Length Size 2 cartridge, No flange

Product ID: POV52UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 5 μm, Polypropylene, Length Size 2 cartridge, Nitrile

Product ID: POV52UNPFF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 5 μm, Polypropylene, Length Size 2 cartridge, Plastic self-adjusting flange

Product ID: POV52UNPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 5 μm, Polypropylene, Length Size 1 cartridge, Fluorocarbon elastomer

Product ID: POV51UVPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 cartridge
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ High Flow Large Format Filters, Removal Rating 5 µm, Polypropylene, Length 40 inches

Product ID: HFV640PP005PH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
5 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™, Large Format Filters, Filter Grade 5 µm, Polypropylene, Size 2 Bag, Nitrile

Product ID: PFTM52UNPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 Bag
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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48 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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