Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Seal Material

Nitrile

Anti Static

No

Ultipor Glass Fiber 5µm Nitrile Seal 10in 25.4cm length

Product ID: HC9730FKP10H
Unit of Measure
4/EA
Min Order Qty
4
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9730
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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HCY-8300EOM39HYK

Product ID: HCY8300EOM39HYK
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCY830
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
50 µm
Nominal Length (Imperial)
39 in
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Ultipor III Wire Mesh 25 micron Nitrile 16in 40.64cm length

Product ID: HC8900EOJ16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC8900
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
25 µm
Nominal Length (Imperial)
16 in
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Element Coralon HC2256FCT6H

Product ID: HC2256FCT6H
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2256
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 1000
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HC2286EOS30H50, ELEMENT

Product ID: HC2286EOS30H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2286
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating
100 micron
Filter Removal Rating (μm)
100 µm
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Ultipor III Glass Fiber 25 micron (Beta 1000) Nitrile 8in 20.32cm

Product ID: HC9600FTT8H
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9600
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
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HCY-8300EOR39HYK

Product ID: HCY8300EOR39HYK
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCY830
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
65 µm
Nominal Length (Imperial)
39 in
See All Attributes

Ultipor III Wire Mesh 50 micron Nitrile 13in 33.02cm

Product ID: HC9600EOM13H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
50 µm
Nominal Length (Imperial)
13 in
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HCY-8300EOJ16H

Product ID: HCY8300EOJ16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCY830
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
22 µm
Nominal Length (Imperial)
16 in
See All Attributes

Red1000 Glass Fiber 22 micron (Beta 1000) Nitrile 6in 15.24cm (REPLACED BY HC2216FRT6Z)

Product ID: HC2216FKT6H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2216
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 1000
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Wire Mesh Nitrile 16in 40.64cm

Product ID: HC8300FER16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC8300
Family
Ultipor III
Filter Media
Wire Mesh
Nominal Length (Imperial)
16 in
Nominal Length (Metric)
40.64 cm
See All Attributes

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 4in 10.16cm (REPLACED BY HC9021FHP4HY923)

Product ID: HC9021FDP4HY923
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9021
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
186 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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