Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Industrial Manufacturing

Availability

In Stock

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 6 Inches

Product ID: HC2196FRN6H50
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2196
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
See All Attributes

ELEMENT UE210AT20Z

Product ID: UE210AT20Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE210
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes

Duo-Fine®, Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, FluorocarbonElastomer, SOE flat closed end external 222 O-rings

Product ID: DFPT0230EVM3562
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
See All Attributes

Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 10 Inches, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFNT0210UE
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.2 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
Blank - DOE with elastomer gasket seals & end caps
Change Out Differential Pressure
2.4 bard
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 5 μm, GlassFiber, Length 8 inches

Product ID: HC9801FHP8ZYMC
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9801
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 12 μm, GlassFiber, Length 39 Inches

Product ID: HC8324FRS39Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC8324
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 5 μm, GlassFiber, Length 19 Inches

Product ID: HC2544FRP19Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2544
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
See All Attributes

Duo-Fine® , Filter Cartridges, Removal Rating 50 μm

Product ID: DFN501401
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
50 µm
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.6 in
Cartridge Outer Diameter (OD) (Metric)
6.6 cm
Cage, Core
Polypropylene
Packaging Type
Standard packaging
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 39 inches

Product ID: HC9400FRN39Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9400
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 36 Inches

Product ID: HC2296FRZ36H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2296
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 18 inches

Product ID: HC0101FRN18HY514
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC0101
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 5 μm, GlassFiber, Length 16 inches

Product ID: HC9601FHP16J
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9601
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
See All Attributes
910 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English