Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

In Stock

Product Type

Filter Cartridges

Duo-Fine® , Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN1040AN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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This product is currently not available. Please contact us for more information.

PUY1UY1000J

Product ID: PUY1UY1000J
Unit of Measure
1/EA
Min Order Qty
1

CTRG PROFILE R4F 100 ECO TEC 12684

Product ID: 12684
Unit of Measure
9/EA
Min Order Qty
9

Duo-Fine®, Filter Cartridges, Removal Rating 0.45 μm

Product ID: DFPT0454EVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
End Configuration
SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0) 3
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 9.875 inches

Product ID: CLR19875
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 20 Inches, Nitrile, DOE industrial, 100 Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 20 Inches, Nitrile, DOE industrial, 100 Bubble Test

Product ID: PFT04520UNB
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm

Claris® Filter Cartridge, CLR110W480

Product ID: CLR110W480
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket O-Ring Code
Blank
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LP6F

Product ID: LP6F
Unit of Measure
4/EA
Min Order Qty
4
Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches

Product ID: CLR2040
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
20 micron

Duo-Fine® II, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, SOE fin end external 226 O-rings

Product ID: DFN1040UEM7
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
End Configuration
SOE fin end, external 226 O-rings
Change Out Differential Pressure
2.4 bard

This product is currently not available. Please contact us for more information.

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 Inches, Nitrile

Product ID: PFT3010UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm

AVS1M30

Product ID: AVS1M30
Unit of Measure
24/EA
Min Order Qty
24
545 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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