Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Lube and Hydraulic Elements

Family

Ultipor III

Seal Material

Fluorocarbon

Ultipor III Glass Fiber 5 micron (Beta 1000) Fluorocarbon 4in 10.16cm

Product ID: HC9600FTP4Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9600
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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Ultipor III Wire Mesh 65 micron Fluorocarbon 3in 7.62cm length

Product ID: HC0469EOR3Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Element Series
HC0469
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
65 µm
Nominal Length (Imperial)
3 in
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Ultipor III Fluorocarbon 40in 101.6cm length

Product ID: HC0678FGN40Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC0678
Family
Ultipor III
Filter Removal Rating (μm)
-
Nominal Length (Imperial)
40 in
Nominal Length (Metric)
101.6 cm
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This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) Fluorocarbon 8in 20.32cm (REPLACED BY HC9021FHP8ZYMC)

Product ID: HC9021FDP8ZYMC
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9021
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 7 micron (Beta 1000) Fluorocarbon 39in 99.06cm (REPLACED BY HC8900FRN39Z)

Product ID: HC8900FKN39Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) Fluorocarbon 4in 10.16cm (REPLACED BY HC9601FHP4ZYMC)

Product ID: HC9601FDP4ZYMC
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9601
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 25 micron (Beta 1000) Fluorocarbon 8in 20.32cm (REPLACED BY HC9801FHT8ZYMC)

Product ID: HC9801FDT8ZYMC
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9801
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
15 µm
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This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 12 micron (Beta 1000) Fluorocarbon 8in 20.32cm

Product ID: HC9651FDS8Z
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9651
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) Fluorocarbon 39in 99.06cm (REPLACED BY HC2119FRP39Z)

Product ID: HC2119FKP39Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2119
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

Ultipor III Glass Fiber 5 micron (Beta 1000) Fluorocarbon 8in 20.32cm (REPLACED BY HC9021FHP8ZY923)

Product ID: HC9021FDP8ZY923
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9021
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 7 micron (Beta 1000) Fluorocarbon 16in 40.64cm (REPLACED BY HC9604FRN16ZYQ63)

Product ID: HC9604FKN16ZYQ63
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9604
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 7 micron (Beta 1000) Fluorocarbon 16in 40.64cm (REPLACED BY HC8904FRN16ZYE)

Product ID: HC8904FKN16ZYE
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8904
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

This product is currently not available. Please contact us for more information.

67 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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