Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Profile®

Product Type

Filter Cartridges

Profile® Nylon, Filter Cartridges, Removal Rating 20 μm, Nylon, Length 10 Inches

Product ID: RGN1FN200NPL
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Profile® Star Filter Cartridge, AB2A0507WH4

Product ID: AB2A0507WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: R3F1200
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration
R type housing
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Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: RM2F150H21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
15 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: RM2F120H21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
12 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: RM1F002H21NPL
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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CTRG PROFILE PIH AB C4 20" 010 product photo

CTRG PROFILE PIH AB C4 20" 010

Product ID: ME3310FPZ20H
Unit of Measure
24/EA
Min Order Qty
24

Profile® Star, FilterCartridges, Removal Rating 20 μm, Polypropylene, Length 30 Inches, silicone

Product ID: AB3A2007H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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This product is currently not available. Please contact us for more information.

AB3UY0457H4

Product ID: AB3UY0457H4
Unit of Measure
1/EA
Min Order Qty
1

ME3310FPY20H 132

Product ID: ME3310FPY20H132
Unit of Measure
12/EA
Min Order Qty
12

R4F100

Product ID: R4F100TIMONIUM
Unit of Measure
12/EA
Min Order Qty
12

R1F020

Product ID: R1F020TIMONIUM
Unit of Measure
24/EA
Min Order Qty
48
594 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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