Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Availability

In Stock

RM2F005H21-COA

Product ID: RM2F005H21COATIMMD
Unit of Measure
24/EA
Min Order Qty
48
Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches, Timonium product photo

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches, Timonium

Product ID: RM2F010H21TIMONIUM
Unit of Measure
48/EA
Min Order Qty
48
Removal Rating
1 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
See All Attributes

RM2F070H21-COA

Product ID: RM2F070H21COATIMMD
Unit of Measure
24/EA
Min Order Qty
48

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches, Timonium

Product ID: RM2F050H21TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
See All Attributes

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: RM2F100H21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
See All Attributes

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches, Timonium

Product ID: RM2F900H21TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
90 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
See All Attributes

RM3F050H21

Product ID: RM3F050H21TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches, Timonium

Product ID: RM3F200H21TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
20 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes

20" Profile® II Nylon Filter Cartridge

Product ID: HC3310FGT20Z
Unit of Measure
12/EA
Min Order Qty
12

LP6F

Product ID: LP6F
Unit of Measure
4/EA
Min Order Qty
4

ME3310CPG13H 132

Product ID: ME3310CPG13H132
Unit of Measure
1/EA
Min Order Qty
1

ME3310CPR13H 132

Product ID: ME3310CPR13H132
Unit of Measure
60/EA
Min Order Qty
60
132 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English