Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Type

Filter Cartridges

Gasket / O-Ring Material

Nitrile

Filter Media

Polypropylene

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial, 100 Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial, 100 Bubble Test

Product ID: PFT0810UNB
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm

Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, Nitrile, DOE industrial

Product ID: XLD320UN
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Nitrile
See All Attributes

Nexis® A Series Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 30 inches, Nitrile

Product ID: NXA12030UM18N
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 20 Inches, Nitrile, DOE industrial, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 20 Inches, Nitrile, DOE industrial, No Bubble Test

Product ID: PFT0820UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial, 100 Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial, 100 Bubble Test

Product ID: PFT310UNB
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, Nitrile, SOE fin end external 222 O-rings

Product ID: NXT520UM8N
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Nitrile
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 20 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 20 Inches, Nitrile

Product ID: PFT10020UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
100 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 Inches, Nitrile, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 Inches, Nitrile, DOE industrial

Product ID: PFT1040UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 Inches, Nitrile

Product ID: PFT1020UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial, Standard packaging product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial, Standard packaging

Product ID: PFT0810UN414
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm

Poly-Fine® ARD, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 Inches

Product ID: ARD530UNDOE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 Inches, Nitrile

Product ID: PFT3020UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
112 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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