Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Sub Type

Depth Filters

Product Type

Filter Cartridges

Filter Media

Polypropylene

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, EPDM, SOE fin end external 226 O-rings

Product ID: NXT530UM7E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
EPDM
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT530UM3E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
EPDM
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: NXT530UM3N
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT530UM7S
Unit of Measure
24/EA
Min Order Qty
24
Micron
5 micron
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: NXT530UM8V
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron

Nexis® T Series Filter Cartridges, Polypropylene, 5 µm, 30 in., No End Caps

Product ID: NXT530UW480
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Change Out Differential Pressure
2.4 bard
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 39 inches product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 39 inches

Product ID: NXT539UH21
Unit of Measure
10/EA
Min Order Qty
10
Micron
5 micron
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 222 O-rings

Product ID: NXT530UM8S
Unit of Measure
24/EA
Min Order Qty
24
Micron
5 micron

Nexis® T Series Filter Cartridges, Polypropylene, 5 µm, 30 in., Silicone Elastomer, M7

Product ID: NXT530UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps) product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps)

Product ID: NXT540U
Unit of Measure
10/EA
Min Order Qty
10
Micron
5 micron

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT540NM3V181
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
End Configuration
M3 - SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0)4
Cartridge Type
NXT
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches

Product ID: NXT540U664
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
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1,113 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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