Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

DFT Classic®

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, 316 stainless steel, with Extended Core, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, 316 stainless steel, with Extended Core, Individually wrapped

Product ID: G010AW30SEC1S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 30 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 30 Inches, 316 stainless steel

Product ID: G075AW30S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
U010AW20U product photo

U010AW20U

Product ID: U010AW20U
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 30 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 30 Inches, 304 stainless steel

Product ID: F010RW30A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, Polypropylene, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, Polypropylene, Individually wrapped

Product ID: U005AW40U1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 19.5 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 19.5 Inches, Polypropylene

Product ID: U05AW195UC
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, Polypropylene, Individually wrapped

Product ID: U001AW20U1PK
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 30 Inches, Electrolytic tin plated steel, with Core Cover product photo

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 30 Inches, Electrolytic tin plated steel, with Core Cover

Product ID: C05AW30TC
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Polyester, Length 30 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Polyester, Length 30 Inches

Product ID: E005AW30A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, 316 stainless steel

Product ID: C010AW40SNM3S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
U025AW29.5U product photo

U025AW29.5U

Product ID: U025AW295U
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 29.5 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 29.5 Inches, 304 stainless steel, Bulk packaging

Product ID: C020AW295A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
404 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English