Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Nexis®

Cartridge Length (Metric)

254 mm

Product Use

Pre-Filtration

Filter Media

Polypropylene

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, EPDM product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, EPDM

Product ID: NXA0510UM7E
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
Nexis® T Filter Cartridges, Removal Rating 15 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 15 μm, Polypropylene, Length 10 inches

Product ID: NXT1510U
Unit of Measure
30/EA
Min Order Qty
30
Micron
15 micron
NXA 40-10U-M7S product photo

Nexis, NXA, 40 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), Silicone gasket

Product ID: NXA4010UM7S
Unit of Measure
1/EA
Min Order Qty
1
Micron
40 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, silicone, SOE fin end external 226 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT1010UM7S
Unit of Measure
24/EA
Min Order Qty
24
Micron
10 micron
NXT 0.5-10U-M7E product photo

Nexis, NXT, 0.5 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), EPDM gasket

Product ID: NXT0510UM7E
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches

Product ID: NXT110U
Unit of Measure
30/EA
Min Order Qty
30
Micron
1 micron
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXT20010UH21
Unit of Measure
30/EA
Min Order Qty
30
Micron
200 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE with elastomer gasket seals and end caps product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE with elastomer gasket seals and end caps

Product ID: NXT1010UDOET
Unit of Measure
30/EA
Min Order Qty
30
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE with elastomer gasket seals and end caps product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE with elastomer gasket seals and end caps

Product ID: NXT10010UDOET
Unit of Measure
60/EA
Min Order Qty
60
Micron
100 micron
NXA 120-10U-M7E product photo

Nexis, NXA, 120 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), EPDM gasket

Product ID: NXA12010UM7E
Unit of Measure
1/EA
Min Order Qty
1
Micron
120 micron
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, EPDM, DOE with elastomer gasket seals and end caps product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXA2010UDOEE
Unit of Measure
60/EA
Min Order Qty
60
Micron
20 micron
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, Nitrile product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, Nitrile

Product ID: NXA0510UM3N
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
61 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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