Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Poly-Fine®

Industries

Industrial Manufacturing

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings

Product ID: PFT0830UT
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.8 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, Silicone Elastomer, SOE – single open end with fin end and external 222 O-rings product photo
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
PFT 10-10UEW 480 product photo

PFT 10-10UEW 480

Product ID: PFT1010UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 20 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE fin end external 226 O-rings

Product ID: PFT0820UTM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.8 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 Inches, silicone

Product ID: PFT2010USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 20 Inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings

Product ID: PFT0820UFM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.8 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 Inches, silicone, SOE fin end external 226 O-rings

Product ID: PFT5010USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
50 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 Inches, EPDM

Product ID: PFT340UE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
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PFT-INEOS-10 121 product photo

PFT-INEOS-10 121

Product ID: PFTINEOS10121
Unit of Measure
1/EA
Min Order Qty
1

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: PFT530UVM8
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 20 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings

Product ID: PFT04520UVM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
See All Attributes

PUY1UY020H

Product ID: PUY1UY020H
Unit of Measure
1/EA
Min Order Qty
1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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