Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industrial Manufacturing

Featured product

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Filter Removal Rating

12 µm

Anti Static

No

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 12 μm, GlassFiber, Length 13 inches

Product ID: CT3009C/8
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 2000
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
Filter Removal Rating (μm)
12 µm
See All Attributes

Ultipor III Glass Fiber 12 micron (Beta 1000) Fluorocarbon 13in 33.02cm (REPLACED BY HC6400FRS13Z)

Product ID: HC6400FDS13Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC6400
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Ultipor III Glass Fiber 12 micron (Beta 1000) Nitrile 26in 66.04cm (REPLACED BY HC6500FRS26Z)

Product ID: HC6500FDS26H
Unit of Measure
1/EA
Min Order Qty
8
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC6500
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Versalon Glass Fiber 12 micron (Beta 1000) Nitrile 13in 33.02cm

Product ID: HCG300FKS13H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HCG300
Family
Versalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Ultipor III Glass Fiber 12 micron (Beta 1000) Fluorocarbon 6in 15.24cm length (REPLACED BY HC0014FRS6Z)

Product ID: HC0014FKS6Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0014
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Ultipor III Glass Fiber 12 micron (Beta 1000) Nitrile 4in 10.16cm (REPLACED BY HC7500SRS4Z)

Product ID: HC7500SKS4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC7500
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 12 micron (Beta 1000) Nitrile 16in 40.64cm (REPLACED BY HC8300FRS16Z)

Product ID: HC8300FKS16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8300
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Ultipor III Glass Fiber 12 micron (Beta 1000) Nitrile 39in 99.06cm (REPLACED BY HC8300FRS39HY755)

Product ID: HC8300FKS39HY755
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8300
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 12 micron (Beta 1000) Nitrile 26in 66.04cm (REPLACED BY HC8400FRS26Z)

Product ID: HC8400FKS26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8400
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Ultipor III Glass Fiber 12 micron (Beta 1000) Fluorocarbon 16in 40.64cm (REPLACED BY HC8800FRS16Z)

Product ID: HC8800FKS16Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8800
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Ultipor III Glass Fiber 12 micron (Beta 1000) Fluorocarbon 39in 99.06cm (REPLACED BY HC8900FRS39Z)

Product ID: HC8900FKS39Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 12 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC8900FRS8Z)

Product ID: HC8900FKS8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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