Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

30 in

Ultipor® GF Plus, Filter Cartridges, Length 30 Inches, silicone

Product ID: AB3U030Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Supor® Beverage Filter Cartridges, AB3SBB7WH4

Product ID: AB3SBB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
PES
Effective Filtration Area (Metric m²)
2.31 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
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Ultipor® GF Plus, Filter Cartridges, Length 30 Inches, silicone

Product ID: AB3U220Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Ultipor® GF Plus, Filter Cartridges, Length 30 Inches, silicone,Dual 226 size O-rings bayonet lock finned end

Product ID: AB3U010Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Ultipor® GF Plus, Filter Cartridges, Length 30 Inches

Product ID: AB3U2-20Z7H15
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket O-Ring Code
H15

This product is currently not available. Please contact us for more information.

Ultipor® GF Plus, Filter Cartridges, Length 30 Inches, silicone, 226 O-ring replacement size

Product ID: AB3U6-40Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
Gasket O-Ring Code
H4
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This product is currently not available. Please contact us for more information.

Ultipor® GF Plus, Filter Cartridges, Length 30 Inches, silicone

Product ID: AB3U100Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
Gasket O-Ring Code
H4
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Ultipor® GF Plus, Filter Cartridges, Length 30 Inches

Product ID: AB3U640Z7H13
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket O-Ring Code
H13
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Ultipor® GF Plus, Filter Cartridges, Length 30 Inches, Ethylene Propylene

Product ID: AB3U010Z7J
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Ethylene Propylene
Gasket O-Ring Code
J
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Profile® UP, Filter Cartridges, Removal Rating 20 μm, Length 30 Inches

Product ID: AB3UY2003H
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Ultipor® N66 Filter Cartridges, Nylon Hardware, 0.45 µm Single Layer, 30 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: ABN3NB7BWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
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PREcart PP II Filter Cartridges, 2 µm, 30 in, Silicone Elastomer, 499A120W073SP

Product ID: B12437
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
2 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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207 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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