Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Type

Service Spare Parts

FLOW TRANS,IFM EFECTOR,24V,2.0",0-412CFM product photo

FLOW TRANS,IFM EFECTOR,24V,2.0",0-412CFM

Product ID: WH031989
Unit of Measure
1/EA
Min Order Qty
1
POSITIONER,ELEC-PNEUM DIGITAL,SMC,IP8101 product photo

POSITIONER,ELEC-PNEUM DIGITAL,SMC,IP8101

Product ID: WH034897
Unit of Measure
1/EA
Min Order Qty
1
PLC COMP,AB,COMPACTLOGIX PWR SPPLY,24VDC product photo

PLC COMP,AB,COMPACTLOGIX PWR SPPLY,24VDC

Product ID: WH049430
Unit of Measure
1/EA
Min Order Qty
1
NUT,MODULE,END CAP,2010 product photo

NUT,MODULE,END CAP,2010

Product ID: WH060417
Unit of Measure
1/EA
Min Order Qty
1
WRENCH,6.0IN MF MODULE NUT, 2010 DESIGN product photo

WRENCH,6.0IN MF MODULE NUT, 2010 DESIGN

Product ID: WH060418
Unit of Measure
1/EA
Min Order Qty
1
WRENCH,TORQUE,MODULE,30-150FT LB product photo

WRENCH,TORQUE,MODULE,30-150FT LB

Product ID: WH061734
Unit of Measure
1/EA
Min Order Qty
1
MOTOR,AMIAD,1/4 HP,208v/3ph,SAF4500 product photo

MOTOR,AMIAD,1/4 HP,208v/3ph,SAF4500

Product ID: WH078907
Unit of Measure
1/EA
Min Order Qty
1
COUPLING,FLEX,GRV,1.0IN,NONMETAL,LP product photo

COUPLING,FLEX,GRV,1.0IN,NONMETAL,LP

Product ID: WH101801
Unit of Measure
1/EA
Min Order Qty
1
SOLENOID,FESTO,MPA2,2X3/2,TYPE K product photo

SOLENOID,FESTO,MPA2,2X3/2,TYPE K

Product ID: WH175559
Unit of Measure
1/EA
Min Order Qty
1
PLC COMP,AB,1769IO,ANALOG OUTPUT,4CHAN product photo

PLC COMP,AB,1769IO,ANALOG OUTPUT,4CHAN

Product ID: WH179055
Unit of Measure
1/EA
Min Order Qty
1
LUBRICANT,FERGUSON PROSELECT,QUART product photo

LUBRICANT,FERGUSON PROSELECT,QUART

Product ID: WH200185
Unit of Measure
1/EA
Min Order Qty
1
GASKET 1314-V-BFN product photo

GASKET 1314-V-BFN

Product ID: EGR30087VI
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.
63 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English