Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Cartridge Length (Imperial)

13 in

Product Use

Lube and Hydraulic Oil Filtration

Athalon, 6000psi Simplex Hsg, 1.5in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: UH310E2413ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 2in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: UH310E3213ZGH
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: UH310E2413ZGH
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 2in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: UH310E3213ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 13in Length, Fluorocarbon Seals

Product ID: UH310K2413ZG3
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 13in Length, Fluorocarbon Seals

Product ID: UH310S2413ZG6
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 13in Length, Fluorocarbon Seals

Product ID: UH310S2413ZC3
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 13in Length, Fluorocarbon Seals

Product ID: UH310S2413ZG6H
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 13in Length, Fluorocarbon Seals

Product ID: UH310K2413ZC6
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 13in Length, Fluorocarbon Seals

Product ID: UH310S2413ZG3
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 13in Length, Fluorocarbon Seals

Product ID: UH310K2413ZG6
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 13in Length, Fluorocarbon Seals

Product ID: UH310S2413ZC6
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes
151 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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