Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Metric)

495 mm

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 19.5 inches product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 19.5 inches

Product ID: NXT50195U
Unit of Measure
10/EA
Min Order Qty
10
Micron
50 micron

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 19.5 inches, DOE Santoprene gasket seal

Product ID: NXT5195UH21
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 19.5 inches

Product ID: NXT5195U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 19.5 Inches product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 19.5 Inches

Product ID: PFT025195UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 19.5 Inches, Fluorocarbon Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 19.5 Inches, Fluorocarbon Elastomer

Product ID: PFT045195UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 19.5 Inches, EPDM product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 19.5 Inches, EPDM

Product ID: PFT045195UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 19.5 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 19.5 Inches, Polypropylene

Product ID: U001AW195UC
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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Discontinued

This part is no longer available. Please contact us for more information.
DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 19.5 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 19.5 Inches, Polypropylene

Product ID: U005AW195U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Premium polypropylene, Length 19.5 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Premium polypropylene, Length 19.5 Inches, Polypropylene

Product ID: U005KW195U
Unit of Measure
3/EA
Min Order Qty
3
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 19.5 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 19.5 Inches, Polypropylene

Product ID: U010AW195U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 19.5 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 19.5 Inches, Polypropylene

Product ID: U05AW195UC
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 19.5 Inches, 304 stainless steel, with Core Cover

Product ID: C005AW195AC
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
5 µm
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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This product is currently not available. Please contact us for more information.

61 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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