Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Sub Type

Depth Filters

Product Type

Filter Cartridges

Filter Media

Polypropylene

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene

Product ID: CLR1395
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
NA
End Configuration Code
Blank
End Configuration
Blank - DOE industrial (no end caps)
Change Out Differential Pressure
2.4 bard
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches

Product ID: CLR120
Unit of Measure
24/EA
Min Order Qty
24
Length
50.8 cm / 20 in
Micron
1 micron

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 39 inches, silicone

Product ID: CLR139M8S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
39 in
Cartridge Length (Metric)
991 mm
Cartridge Length (Metric)
99.1 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: CLR140M3E
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
EPDM
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, EPDM, DOE with elastomer gasket seals & end caps

Product ID: CLR140DOEE
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
EPDM
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 222 O-rings

Product ID: CLR140M8S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, SOE plastic spring assembly saw cut end

Product ID: CLR130XK
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 50 inches, silicone

Product ID: CLR150M8S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
50 in
Cartridge Length (Metric)
1270 mm
Cartridge Length (Metric)
127 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 50 inches, SOE plastic spring assembly saw cut end

Product ID: CLR150XK
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
50 in
Cartridge Length (Metric)
1270 mm
Cartridge Length (Metric)
127 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 9.875 inches

Product ID: CLR19875
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, silicone, DOE with elastomer gasket seals & end caps

Product ID: CLR2030DOES
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 19.5 inches

Product ID: CLR20195
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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641 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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