Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Microelectronics

Product Type

Filter Cartridges

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: RM1F900H21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
90 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Profile® Star Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, Ethylene Propylene, double O-ring with flat end

Product ID: AB2A0503J
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 3
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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AB2P01019J

Product ID: AB2P01019JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

VFTR200-10M3S 300

Product ID: VFTR20010M3S300
Unit of Measure
1/EA
Min Order Qty
1
U010A10U product photo

U010A10U

Product ID: U010A10U
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, EPDM, SOE fin end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, EPDM, SOE fin end external 222 O-rings

Product ID: NXT130UM8E
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
NXA 40-10U-M7S product photo

Nexis, NXA, 40 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), Silicone gasket

Product ID: NXA4010UM7S
Unit of Measure
1/EA
Min Order Qty
1
Micron
40 micron

NXT 75-19.5U

Product ID: NXT75195U
Unit of Measure
10/EA
Min Order Qty
10

WF4P20018H13

Product ID: WF4P20018H13TIMMD
Unit of Measure
12/EA
Min Order Qty
12
U025A9.75U-1PK product photo

U025A9.75U-1PK

Product ID: U025A975U1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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U005A10UCE product photo

U005A10UCE

Product ID: U005A10UCE
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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AB1UVI3EHF

Product ID: AB1UVI3EHF
Unit of Measure
1/EA
Min Order Qty
1
315 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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