Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Media

Polypropylene

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: R2F070
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration
R type housing
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Ultipor® GF Plus, Filter Cartridges, Length 30 Inches

Product ID: AB3U2-20Z7H15
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket O-Ring Code
H15

This product is currently not available. Please contact us for more information.

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT02530UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, silicone, DOE with elastomer gasket seals and end caps

Product ID: NXT520UDOES
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: RM3F003H21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Discontinued

This part is no longer available. Please contact us for more information.

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: CLR303040
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 16.25 inches

Product ID: NXT101625UM3F
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 micron

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 39.5 inches

Product ID: NXT10395UH21
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
39.5 in
Cartridge Length (Metric)
1003 mm
Cartridge Length (Metric)
100.3 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 9.875 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 9.875 inches, DOE Santoprene gasket seal

Product ID: NXT1009875UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
100 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, EPDM, DOE industrial, Bulk packaging product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, EPDM, DOE industrial, Bulk packaging

Product ID: PFT02520UEBLK797
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: NXT530UM3N
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
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Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, Nitrile, DOE industrial, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, Nitrile, DOE industrial, No Bubble Test

Product ID: PFT330UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
1,574 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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