Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Use

Pre-Filtration

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 222 O-rings

Product ID: NXA130UM8S
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 39 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 39 inches

Product ID: NXA139UM18E
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXA130UH21
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-ring product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-ring

Product ID: NXA140UM18E
Unit of Measure
24/EA
Min Order Qty
24
Micron
1 micron
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps)

Product ID: NXA140U
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
NXA 1-4U-M3S product photo

Nexis, NXA, 1 μm, 10.2 cm (4 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), Silicone gasket

Product ID: NXA14UM3S
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 222 O-rings

Product ID: NXA140UM8S
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
Nexis® A Series Filter Cartridges, Polypropylene, Length 30 inches, EPDM product photo

Nexis® A Series Filter Cartridges, Polypropylene, Length 30 inches, EPDM

Product ID: NXA1530UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
15 micron
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, DOE industrial (no end caps)

Product ID: NXA2010U
Unit of Measure
30/EA
Min Order Qty
30
Micron
20 micron
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, EPDM, DOE with elastomer gasket seals and end caps product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXA2010UDOEE
Unit of Measure
60/EA
Min Order Qty
60
Micron
20 micron
NXA 20-19.75U-H21 product photo

Nexis, NXA, 20 μm, 50.2 cm (19.75 in), DOE, Santoprene gasket seal

Product ID: NXA201975UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
20 micron
NXA 20-20U-M3E product photo

Nexis, NXA, 20 μm, 50.8 cm (20 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA2020UM3E
Unit of Measure
1/EA
Min Order Qty
1
Micron
20 micron
295 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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