Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Gasket / O-Ring Material

Nitrile

Filter Media

Polypropylene

Poly-Fine® ARD, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 Inches

Product ID: ARD530UNDOE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 Inches, Nitrile

Product ID: PFT3020UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, Nitrile, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: PFT0810UNM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.1 μm, Polypropylene, Length 10 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.1 μm, Polypropylene, Length 10 Inches, Nitrile

Product ID: PFT0110UN959
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.1 µm
Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, Nitrile, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: NXT2030UM3N
Unit of Measure
24/EA
Min Order Qty
24
Micron
20 micron
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 20 inches, Nitrile, SOE flat closed end external 222 O-ring product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 20 inches, Nitrile, SOE flat closed end external 222 O-ring

Product ID: NXT10020UM18N
Unit of Measure
12/EA
Min Order Qty
12
Micron
100 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial

Product ID: PFT310UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: CLR2040M3N
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 19.75 Inches product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 19.75 Inches

Product ID: PFT31975UN
Unit of Measure
12/EA
Min Order Qty
12
Micron
3 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches, Nitrile

Product ID: PFT320UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, Nitrile, DOE with elastomer gasket seals and end caps

Product ID: NXT530UDOEN
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 Inches, Nitrile

Product ID: PFT3030UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
119 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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