Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

HDC®

Industries

Industrial Manufacturing

Product Type

Filter Cartridges

CRTG DFA4001BNUL

Product ID: DFA4001BNUL
Unit of Measure
6/EA
Min Order Qty
6

Junior Filter HDC II 20µm

Product ID: MCY2230J200H4
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Junior Filter HDC II 20µm product photo

Junior Filter HDC II 20µm

Product ID: MCY2230J200J
Unit of Measure
1/EA
Min Order Qty
1

MCY4463J700H13

Product ID: MCY4463J700H13
Unit of Measure
12/EA
Min Order Qty
12
Filter 10" HDC II 0.6µm product photo

Filter 10" HDC II 0.6µm

Product ID: AB1J0067H1
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

AB1J025-8H1

Product ID: AB1J0258H1
Unit of Measure
1/EA
Min Order Qty
1

Filter 10" HDC II 70µm

Product ID: MCY1001J700H13
Unit of Measure
1/EA
Min Order Qty
1

AB1J012-8H1

Product ID: AB1J0128H1
Unit of Measure
6/EA
Min Order Qty
6

Filter 20" HDC II 10µm

Product ID: MCY1002J100H
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Junior Filter HDC II 10µm

Product ID: MCY4463J100H4
Unit of Measure
12/EA
Min Order Qty
12

AB1J012-8H4

Product ID: AB1J0128H4
Unit of Measure
6/EA
Min Order Qty
6

Junior Filter HDC II 2.5µm

Product ID: MCY4463J025H4
Unit of Measure
12/EA
Min Order Qty
12
109 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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