Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Sub Type

Pleated Filters

Product Type

Filter Cartridges

Junior Filter HDC II 70µm product photo

Junior Filter HDC II 70µm

Product ID: MCY4463J700H4
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CRTG MCY4463U2-20ZJ

Product ID: MCY4463U220ZJ
Unit of Measure
24/EA
Min Order Qty
24

DFPT 1-30EV-M8

Product ID: DFPT130EVM8
Unit of Measure
1/EA
Min Order Qty
1
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 20 Inches, silicone, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 20 Inches, silicone, DOE industrial

Product ID: PFT04520US
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm

Junior Filter HDC II 2.5µm

Product ID: MCY4463J025H13
Unit of Measure
12/EA
Min Order Qty
12

CRTG EA92F2QS

Product ID: EA92F2QS
Unit of Measure
1/EA
Min Order Qty
1

Duo-Fine® , Filter Cartridges, Removal Rating 3 μm, Length 10 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN310AN
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
3 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes
Filter 20" HDC II 70µm product photo

Filter 20" HDC II 70µm

Product ID: MCY1002J700H13
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

5ESC10770-4U0005ZJ-141

Product ID: P2259066
Unit of Measure
1/EA
Min Order Qty
1

5ESC10770-3U0045-140

Product ID: 5ESC107703U0045140
Unit of Measure
1/EA
Min Order Qty
1

Duo-Fine® , Filter Cartridges, Removal Rating 3 μm, Length 30 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: DFNT330UVM3
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
End Configuration
SOE flat closed end, external 222 O-rings
Change Out Differential Pressure
2.4 bard

MCC1401HNTH

Product ID: MCC1401HNTH
Unit of Measure
12/EA
Min Order Qty
12
1,321 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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