Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Ultipor

Ultipor, 6000psi Non-bypass Simplex Hsg, 2in Flange Ports, 26in Length, Fluorocarbon Seals

Product ID: HZ9901D32VW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (3000 #)
Cartridge Length (Imperial)
26 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
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Ultipor Wire Mesh 25µm Fluorocarbon Seal 3in 7.62cm length

Product ID: HC2206EOJ3Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2206
Family
Ultipor
Filter Media
Wire Mesh
Filter Removal Rating (μm)
25 µm
Nominal Length (Imperial)
3 in
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HC2216EOM4H

Product ID: HC2216EOM4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2216
Family
Ultipor
Filter Media
Wire Mesh
Filter Removal Rating (μm)
65 µm
Nominal Length (Imperial)
4 in
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HC2425FKT17

Product ID: HC2425FKT17
Unit of Measure
2/EA
Min Order Qty
2
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2425
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
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HC2425FKN34YQ63

Product ID: HC2425FKN34YQ63
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2425
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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Ultipor, 150psi Simplex Hsg, 1.5in SAE Ports, 8in Length, Nitrile Seals

Product ID: HH2124A24KNSATYS34
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
150 psi
Port Size
1.5 in
Number of Cartridges
1
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HH7400A16+++B1 ASSEMBLY HEAD

Product ID: HH7400A16B1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Family
Ultipor
Pressure Rating
250 psi
Port Size
1 in
Number of Cartridges
1
Material of Construction
Cast Iron
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Ultipor, 250psi Simplex Hsg, 1in BSP Ports, Nitrile Seals

Product ID: HH7400C16A1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Family
Ultipor
Pressure Rating
250 psi
Port Size
1 in
Number of Cartridges
1
Material of Construction
Cast Iron
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Ultipor, 200psi Non-bypass Simplex Hsg, 1.5in BSP Ports, Nitrile Seals

Product ID: HH7500C24W1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Family
Ultipor
Pressure Rating
200 psi
Port Size
1.5 in
Number of Cartridges
1
Material of Construction
Cast Iron
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Ultipor, 250psi Non-bypass Simplex Hsg, 1in BSP Ports, Nitrile Seals

Product ID: HH7400C16W1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Family
Ultipor
Pressure Rating
250 psi
Port Size
1 in
Number of Cartridges
1
Material of Construction
Cast Iron
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Ultipor, 200psi Simplex Hsg, 2in SAE Ports, Nitrile Seals

Product ID: HH7502A32A1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Family
Ultipor
Pressure Rating
200 psi
Port Size
2 in
Number of Cartridges
2
Material of Construction
Cast Iron
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Ultipor, 200psi Simplex Hsg, 2in BSP Ports, Nitrile Seals

Product ID: HH7502C32B1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Family
Ultipor
Pressure Rating
200 psi
Port Size
2 in
Number of Cartridges
2
Material of Construction
Cast Iron
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171 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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