Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Filter Media

Polypropylene

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, Nitrile, DOE with elastomer gasket seals & end caps

Product ID: CLR540DOEN
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, SOE metal spring/polypropylene cap saw cut end

Product ID: CLR530SI
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches

Product ID: CLR540
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
5 micron

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer

Product ID: CLR540M8V
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, EPDM, SOE fin end external 222 O-rings

Product ID: CLR540M8E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
EPDM
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Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 10 inches

Product ID: CLR7510M3N
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
75 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
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Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 30 inches, EPDM

Product ID: CLR7530M3E
Unit of Measure
12/EA
Min Order Qty
24
Removal Rating
75 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
EPDM
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Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 30 inches

Product ID: CLR7530
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
75 micron
Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 9.75 inches

Product ID: CLR75975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
75 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: PFT0840UVM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial

Product ID: PFT1010UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, DOE industrial

Product ID: PFT1010UV
Unit of Measure
30/EA
Min Order Qty
30
Micron
10 µm
1,485 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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