Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

HDC®

Product Type

Filter Cartridges

Filter 10" HDC II 40µm

Product ID: AB1J4007H4
Unit of Measure
1/EA
Min Order Qty
1

Filter 10" HDC II 70µm

Product ID: AB1J7007H4
Unit of Measure
6/EA
Min Order Qty
6

HDC® II Filter Cartridges, Removal Rating 6 μm, Length 20 inches, Ethylene Propylene

Product ID: AB2J0607J
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
6 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Ethylene Propylene
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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This product is currently not available. Please contact us for more information.

HDC® II Filter Cartridges, Removal Rating 20 μm, Length 20 inches

Product ID: AB2J2007J
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Ethylene Propylene
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Discontinued

This part is no longer available. Please contact us for more information.

HDC® II, Filter Cartridges, Removal Rating 1.2 μm, Length 30 Inches, Ethylene Propylene

Product ID: AB3J0127J
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
1.2 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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HDC® II, Filter Cartridges, Length 30 Inches, 226 (Finned end & bayonet lock)

Product ID: AB3J0067H
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
Cartridge Outer Diameter (OD) (Metric)
7 cm
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This product is currently not available. Please contact us for more information.

HDC® II, Filter Cartridges, Removal Rating 1.2 μm, Length 30 Inches

Product ID: AB3J0123J
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
1.2 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 3
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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HDC® II, Filter Cartridges, Removal Rating 4.5 μm, Length 30 Inches, silicone

Product ID: AB3J0457H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
4.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes

FILTER CART

Product ID: AB4J0127H
Unit of Measure
1/EA
Min Order Qty
1

Filter 40" HDC II 10µm

Product ID: AB4J1007H4
Unit of Measure
1/EA
Min Order Qty
1
AKPS30K product photo

CTRG JNR HDC II J100 2230 (NO O RING)

Product ID: AKPS30K
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

AB05J0452H4 product photo

AB05J0452H4

Product ID: AB05J0452H4
Unit of Measure
1/EA
Min Order Qty
1
140 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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