Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Nexis®

Gasket / O-Ring Material

NA

Product Use

Pre-Filtration

Filter Media

Polypropylene

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXT520UH21
Unit of Measure
10/EA
Min Order Qty
10
Micron
5 micron
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches

Product ID: NXT520U
Unit of Measure
10/EA
Min Order Qty
10
Micron
5 micron
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 inches

Product ID: NXT52925U
Unit of Measure
10/EA
Min Order Qty
10
Micron
5 micron
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches

Product ID: NXT530U
Unit of Measure
10/EA
Min Order Qty
10
Micron
5 micron
NXT 75-30U product photo

Nexis, NXT, 75 μm, 76.2 cm (30 in), DOE industrial (no end caps)

Product ID: NXT7530U
Unit of Measure
1/EA
Min Order Qty
1
Micron
75 micron
Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 9.75 inches, DOE industrial (no end caps) product photo

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 9.75 inches, DOE industrial (no end caps)

Product ID: NXT75975U
Unit of Measure
30/EA
Min Order Qty
30
Micron
75 micron
Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 20 inches product photo

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 20 inches

Product ID: NXT7520U
Unit of Measure
10/EA
Min Order Qty
10
Micron
75 micron
Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 10 inches

Product ID: NXT7510U
Unit of Measure
30/EA
Min Order Qty
30
Micron
75 micron
Nexis® T Filter Cartridges, Removal Rating 7 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 7 μm, Polypropylene, Length 10 inches

Product ID: NXT710U
Unit of Measure
30/EA
Min Order Qty
30
Micron
7 micron
105 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English