Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Brand

Profile®

Product Type

Filter Cartridges

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: RM298F400H21
Unit of Measure
48/EA
Min Order Qty
48
Removal Rating
40 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Profile® II Filter Cartridge

Product ID: HC3310FGR13Z
Unit of Measure
1/EA
Min Order Qty
1

R29F400

Product ID: R29F400
Unit of Measure
6/EA
Min Order Qty
6

This product is currently not available. Please contact us for more information.

Profile® II Nylon Filter Cartridge

Product ID: HC3310FGN20Z
Unit of Measure
12/EA
Min Order Qty
12

Filter 40" Profile II 5µm

Product ID: AB4Y05018J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

40" Profile® II Nylon Filter Cartridge

Product ID: HC3310FGP40Z
Unit of Measure
12/EA
Min Order Qty
24

Profile® Nylon, Filter Cartridges, Removal Rating 70 μm, Nylon, Length 10 Inches

Product ID: RGN1FN700NPL
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
70 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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CTRG WF4 PROFILE C18 200 H13

Product ID: WF4P20018H13
Unit of Measure
1/EA
Min Order Qty
1

FILTER

Product ID: ABGN1FN0507H13
Unit of Measure
12/EA
Min Order Qty
12

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: RM3F005H21
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes

40µm, 20", DOE w/seal

Product ID: MCY1002A400J
Unit of Measure
1/EA
Min Order Qty
1

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: RM3F700H21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
70 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes
354 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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