Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Food & Beverage

Availability

In Stock

RETROFIT ADAPTOR SPM 2-HIGH TYPE 2

Product ID: SPMRTF22
Unit of Measure
1/EA
Min Order Qty
1

E962-80 PSP GSK

Product ID: T10512117
Unit of Measure
1/EA
Min Order Qty
1

ORJ7-342 ORG NORDEL E962-90

Product ID: T10520042
Unit of Measure
1/EA
Min Order Qty
1

Ultipor® GF-HT, TA72HT003A

Product ID: TA72HT003A
Unit of Measure
1/EA
Min Order Qty
1
Food Contact Compliant
No

SUPRAdisc™ 16-01 with Drain

Product ID: WSFZ161F31UT5J
Unit of Measure
1/EA
Min Order Qty
1

Marksman™, Large Format Filters, Filter Grade 1.5 µm, Polypropylene, Size 2 bag, EPDM, Plastic self-adjusting flange

Product ID: XLDM152UEPFA
Unit of Measure
4/EA
Min Order Qty
4
102 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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