Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Sub Type

String Wound Filters

Product Type

Filter Cartridges

CC29129C00

Product ID: CC29129C00
Unit of Measure
1/EA
Min Order Qty
1

CC35093C00

Product ID: CC35093C00
Unit of Measure
1/EA
Min Order Qty
1

CC36900D00

Product ID: CC36900D00
Unit of Measure
1/EA
Min Order Qty
1

CC37264C00

Product ID: CC37264C00
Unit of Measure
1/EA
Min Order Qty
1
TUBESHEET 18 ELEMENTS U001Z 0.1 MICRON product photo

TUBESHEET 18 ELEMENTS U001Z 0.1 MICRON

Product ID: CC38892D00U001Z
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CC39011C00 product photo

CC39011C00

Product ID: CC39011C00
Unit of Measure
1/EA
Min Order Qty
1

CC43300C00CRUC

Product ID: CC43300C00CRUC
Unit of Measure
1/EA
Min Order Qty
1

CC42583C00

Product ID: CC42583C00
Unit of Measure
1/EA
Min Order Qty
1

CC51582C00

Product ID: CC51582C00
Unit of Measure
1/EA
Min Order Qty
1

CC60336C00

Product ID: CC60336C00
Unit of Measure
1/EA
Min Order Qty
1

CC59221C00

Product ID: CC59221C00
Unit of Measure
1/EA
Min Order Qty
1

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Polyester, Length 10 Inches

Product ID: E010A10A
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
Membrane Material
Polyester
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Discontinued

This part is no longer available. Please contact us for more information.
178 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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