Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Sub Type

String Wound Filters

Product Type

Filter Cartridges

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, Polypropylene, Bulk packaging

Product ID: C010AW40U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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Discontinued

This part is no longer available. Please contact us for more information.
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, Polypropylene, with Extended Core product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, Polypropylene, with Extended Core

Product ID: C010AW30UEC1U
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 9.75 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 9.75 Inches, 304 stainless steel

Product ID: C020A975A
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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This product is currently not available. Please contact us for more information.

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 20 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 20 Inches, 304 stainless steel, Bulk packaging

Product ID: C020AW20A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 15 μm, Length 20 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 15 μm, Length 20 Inches, 304 stainless steel

Product ID: C015AW20AEC1A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 9.75 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 9.75 Inches, 304 stainless steel, Bulk packaging

Product ID: C050A975A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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0.5um, 20", 2.5 OD, 316 Stainless Steel, Individually wrapped

Product ID: C05AW20S1PK
Unit of Measure
10/EA
Min Order Qty
10
DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 10 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 10 Inches, Polypropylene

Product ID: C100A10U
Unit of Measure
30/EA
Min Order Qty
30

DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 30 Inches, Polypropylene

Product ID: C075AW30U
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
75 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 10 Inches, Electrolytic tin plated steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 10 Inches, Electrolytic tin plated steel

Product ID: C075A10T
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 30 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 30 Inches, 304 stainless steel

Product ID: C100AW30A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 20 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 20 Inches, 316 stainless steel, Bulk packaging

Product ID: C100AW20S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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208 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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