Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Cartridge Length (Imperial)

8 in

Seal Material

Fluorocarbon

Ultipor, 3000psi Non-bypass Simplex Hsg, 0.75in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ9021A12SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
3000 psi
Port Size
0.75 in
Number of Cartridges
1
See All Attributes

Ultipor, 3000psi Non-bypass Simplex Hsg, 0.75in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ9021C12SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
3000 psi
Port Size
0.75 in
Number of Cartridges
1
See All Attributes

Ultipor, 3000psi Non-bypass Simplex Hsg, 0.75in Manifold Mount, 8in Length, Fluorocarbon Seals

Product ID: HZ9021K12SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
3000 psi
Port Size
0.75 in
Number of Cartridges
1
See All Attributes

HZ9661E20++SW1 ASSEMBLY HOUSING

Product ID: HZ9661E20SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ9661A20SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Ultipor, 6000psi Non-bypass Simplex Hsg, 1.5in Manifold Mount, 8in Length, Fluorocarbon Seals

Product ID: HZ9661K24SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in Manifold Mount, 8in Length, Fluorocarbon Seals

Product ID: HZ9681K20SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in Manifold Mount, 8in Length, Fluorocarbon Seals

Product ID: HZ9681S20SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Ultipor, 6000psi Non-bypass Simplex Hsg, 1in Flange Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ9801E16SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ9681C20SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Ultipor, 6000psi Non-bypass Simplex Hsg, 1in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ9801A16SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Ultipor, 6000psi Non-bypass Simplex Hsg, 1in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ9801C16SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes
118 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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