Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Material of Construction

Aluminum

Seal Material

Fluorocarbon

Athalon, 145psi Simplex Hsg, 2.5in Flange Ports, 20in Length, Fluorocarbon Seals

Product ID: UT610D4020ZB
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (3000 #)
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
145 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Athalon, 145psi Simplex Hsg, 3in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UT610D4840ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (3000 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
145 psi
Port Size
3 in
Number of Cartridges
1
See All Attributes

Athalon, 145psi Simplex Hsg, 3in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UT610D4840ZB
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (3000 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
145 psi
Port Size
3 in
Number of Cartridges
1
See All Attributes

Athalon, 145psi Simplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UT610D4040ZB
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (3000 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
145 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Athalon, 145psi Simplex Hsg, 2.5in Flange Ports, 20in Length, Fluorocarbon Seals

Product ID: UT610F4020ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (3000 #)
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
145 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Athalon, 145psi Simplex Hsg, 3in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UT610F4840ZB
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (3000 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
145 psi
Port Size
3 in
Number of Cartridges
1
See All Attributes

Athalon, 145psi Simplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UT610F4040ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (3000 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
145 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

UT610F4020ZB ASSEMBLY HOUSING

Product ID: UT610F4020ZB
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (3000 #)
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
145 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Athalon, 145psi Simplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UT610F4040ZB
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (3000 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
145 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Athalon, 145psi Simplex Hsg, 3in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UT610F4840ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (3000 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
145 psi
Port Size
3 in
Number of Cartridges
1
See All Attributes

Ultipor, 400psi Simplex Hsg, 2.5in Flange Ports, 39in Length, Fluorocarbon Seals

Product ID: HZ8314D40XB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
39 in
Family
Ultipor
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Ultipor, 3000psi Non-bypass Simplex Hsg, 0.75in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ9021A12SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
3000 psi
Port Size
0.75 in
Number of Cartridges
1
See All Attributes
113 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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