Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Removal Rating

5 µm

Beta Rating

BETA 1000

Red1000 Glass Fiber 5 micron (Beta 1000) Fluorocarbon 6in 15.24cm (REPLACED BY HC2256FRP6Z)

Product ID: HC2256FCP6Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2256
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 Micron, Beta 1000
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Fluorocarbon 12in 30.48cm length

Product ID: HC2285FCP12Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2285
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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Discontinued

This part is no longer available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 9in 22.86cm (REPLACED BY HC2544FRP9HYN31)

Product ID: HC2544FKP9HYN31
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2544
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Nitrile 36in 91.44cm (REPLACED BY HC2618FRP36Z)

Product ID: HC2618FCP36HX321
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Nitrile 36in 91.44cm (REPLACED BY HC2618FRP36Z)

Product ID: HC2618FKP36H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Nitrile 18in 45.72cm (REPLACED BY HC2618FRP18Z)

Product ID: HC2618FKP18H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

Red1000 Glass Fiber 5 micron (Beta 1000) Fluorocarbon 10in 25.4cm length

Product ID: HC4900FCP10Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC4900
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Fluorocarbon 6in 15.24cm length

Product ID: HC4900FCP6Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC4900
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 16in 40.64cm (REPLACED BY HC6400FRP16Z)

Product ID: HC6400FDP16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC6400
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) 8in 20.32cm (REPLACED BY HC8200FRP8PY309)

Product ID: HC8200FKP8PY309
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8200
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor SRT Glass Fiber 5 micron (Beta 1000) Fluorocarbon 16in 40.64cm (REPLACED BY HC8300FRP16Z)

Product ID: HC8300FAP16Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8300
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor SRT Glass Fiber 5 micron (Beta 1000) Fluorocarbon 8in 20.32cm (REPLACED BY HC8300FRP8Z)

Product ID: HC8300FAP8Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8300
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

This product is currently not available. Please contact us for more information.

165 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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